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描述
真空等离子清洗机
大纲:
真空等离子清洗机(等离子清洗机),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, 环境保护, efficient and stable surface treatment.
真空等离子清洗机
磷roduct feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
真空等离子清洗机
我ndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Semiconductor industry: semiconductor packaging, 摄像头模组, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: 包装, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
真空等离子清洗机
Specification of equipment:
| Power system |
radio-frequency power supply |
medium-frequency power supply | |
| 力量 | 0~600W | 0~2000W | |
| 频率 | 13.56兆赫兹 | 40千赫 | |
|
Vacuum plant |
Double-stage vane pump (油泵)
|
60m3/h |
|
|
vacuum line |
All stainless steel piping and high strength vacuum bellows | ||
| texture | Aluminum alloy (customizable stainless steel cavity) | ||
| 厚度 | 25毫米 | ||
| leakproofness | Military grade welding seal | ||
| Cavity internal dimensions | 4450×450×500mm
(宽×高×深) |
||
|
Effective size of electrode plate |
420×411mm(width × depth) | ||
| Available space spacing | 22.5毫米 | ||
|
Electrode layout
|
Horizontal arrangement, activity extraction
|
||
| Work tray | Standard one set, material optional (铝, steel wire mesh) | ||
|
work space |
8 layer | ||
| Gas system | flow range | 0~300SCCM | |
| Process gas path | Standard with two, 可以定制 | ||
| 控制系统 | systems control | plc | |
| delivery method | 7 英寸触摸屏 | ||
| Other parameters | 边界尺寸 | 900×1750×1000mm（w×h×d） | |
| 重量 | 200公斤 | ||
| Equipment appearance color | silver gray | ||
工厂规格:
| 工厂规格 | |
|
交流电源规格
|
电源：AC380V，50/60赫兹，5金属丝，50A |
|
工厂废气
|
流动：2.0 m³/min |
|
Gas requirements for plant work
|
流动：1~10 L/min
压力：3~7 kg/cm² 管径：6×4 mm 质地：聚氨酯管材 Purity：多于 99.99% |
|
工厂压缩空气要求
|
流动：1~10 L/min
压力：3~7 kg/cm² 管径：8×5 mm 质地：PUpipe Dew point：-40℃ under Particle＞0.3μm：10Pcs/ft³ |
