MADlink 100 Microaperture Measuring Instrument

MADlink 100 Microaperture Measuring Instrument


MADlink 100 Microaperture Measuring Instrument


Microaperture rapid measuring instrument is a kind of optical instrument which is specially used to measure the diameter of microholes in thin slices. It can effectively solve the technical problem that traditional optical image processing technology and electron microscope can not realize the full detection of microaperture in thin slices. It is characterized by a single snapshot of all microholes in the full range of the wafer (maximum area 5.0×4.5mm), which can output the pore size characteristics, pore size distribution and pore location distribution of all microholes on the wafer.

Figure 1: Microporous sample

Wafer microaperture refers to the diameter of a small hole with a size of micron or even submicron in a flat sheet.


Ordinary optical microscope is limited by optical diffraction phenomenon, the highest resolution can only reach about 0.5μm, so the error is obviously too large to measure the microhole about 1μm with ordinary optical microscope. Moreover, at this time, only 40 times or more of the microscopic objective lens can be used, and the field of view size can only reach 0.2mm or less. It is not possible to capture the whole area in one shot for microporous films made on thin sheets with a location distribution of several millimeters. Even though the measurement through the partition scan may take a lot of time, and the problem of missing detection is inevitable. If a low-power micro objective is used for global shooting measurement, such as 2x, the numerical aperture of the low-power objective is very small (the numerical aperture of the 2x objective is only 0.06), and the diameter of the diffraction spot (Airie spot) caused by the aperture limitation can reach about 10μm. Using such a lens to observe microholes of tens of microns will produce significant blurring. For micropores of the order of 1μm, the ordinary optical microscope image can not reflect the size of the hole. Therefore, the measurement system based on optical micromagnification and digital image processing technology is difficult to complete the global rapid measurement of this kind of microaperture. Although the electron microscope has better depth of field and resolution, but a single measurement of the field of view is smaller, the use of the cost is very high, is not suitable for wide application in thin slice microaperture measurement.


The instrument adopts the light flux microaperture measurement method, and the relationship between the light flux through the microhole and the hole area is proportional to the following figure, which effectively avoids the restriction of optical diffraction on the microaperture size measurement accuracy in the optical microscopic imaging method (imaging lens).

The aperture is calculated according to the luminous flux value of each hole detected by the image sensor, and the light energy loss caused by the optical diffraction of the microhole itself is corrected, so that the measurement of all the microhole apertures in the region can be quickly completed in a single snapshot of the microhole diameter. Finally, the distribution curve of the microhole and the spatial position distribution map are output.


MADlink 100 Microaperture Measuring Instrument


Model MADLink 100
principle of measurement Microporous flux method
measuring range 0.3 ~ 100 μm
Field area 5.0 x 4.5 mm
Minimum pore spacing aperture +10μm
repeatability precede ±1%
measuring time < 1min
system weight 6Kg
System size 250mmx220mmX510mm

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