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Description
Vacuum Plasma Cleaner
Outline:
Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, protection environnementale, efficient and stable surface treatment.
Vacuum Plasma Cleaner
P.roduct feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, petite empreinte
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
Vacuum Plasma Cleaner
jendustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: emballage, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
Vacuum Plasma Cleaner
Specification of equipment:
| Power system |
radio-frequency power supply |
medium-frequency power supply | |
| pouvoir | 0~600W | 0~1000W or 0-2000W | |
| fréquence | 13.56MHz | 40KHz | |
|
Vacuum plant |
Double-stage vane pump (oil pump) | Double stage rotary vane pump (oil pump) or Roots pump + single stage rotary vane pump | |
| vacuum line | All stainless steel piping and high strength vacuum bellows | ||
| texture | Aluminum alloy (customizable stainless steel cavity) | ||
| épaisseur | 25mm | ||
| leakproofness | Military grade welding seal | ||
| Cavity internal dimensions | 500×500×670mm
(largeur × hauteur × profondeur) |
||
|
Effective size of electrode plate |
587×470mm(width × depth) | ||
| Available space spacing | 34mm | ||
|
Electrode layout |
Horizontal arrangement, activity extraction
|
||
| Work tray | Standard one set, material optional (aluminium, steel wire mesh) | ||
|
work space |
8 couche | ||
| Gas system | flow range | 0~300SCCM | |
| Process gas path | Standard with two, can be customized | ||
| Système de contrôle | systems control | PLC | |
| delivery method | 7 écran tactile en pouces | ||
| Other parameters | boundary dimension | 1020×1720×1120mm（w×h×d） | |
| poids | 350KG | ||
| Equipment appearance color | silver gray | ||
Factory specifications:
| Factory specifications | |
|
Ac power specification
|
Source de courant：AC380V，50/60Hz，5wire，50UN |
|
Factory exhaust
|
Flow：2.0 m³/min |
|
Gas requirements for plant work
|
Flow：1~10 L/min
Pressure：3~7 kg/cm² Pipe diameter：6×4 mm Texture：PU pipe Purity：More than 99.99% |
|
Factory compressed air requirements
|
Flow：1~10 L/min
Pressure：3~7 kg/cm² Pipe diameter：8×5 mm Texture：PUpipe Dew point：-40℃ under Particle＞0.3μm：10Pcs/ft³ |
