Paglalarawan

Profilometer

Principle

The instrument measuring principle for rectangular coordinate measuring method, na ang pangalan ay, through the X axis, Z1 shaft sensor, the measured parts of surveying and mapping the surface profile of the coordinates of the point, through the electrical components, will be measured by the sensor the coordinates of the point data transmission to the upper PC, the software of the original coordinate data collected in the survey were mathematical processing, marked with the required engineering survey projects.

Profilometer

Function

Profile measurement function:

Mga Dimensyon: horizontal distance, vertical distance, linear distance, radius, diameter

Included Angle: includes horizontal Angle, vertical Angle and included Angle

Position tolerance: including parallelism and perpendicularity

Shape tolerance: including straightness, convexity and arc

Contour auxiliary generation: including auxiliary points, auxiliary lines and auxiliary circles

Roughness measurement function:

Roughness features: Ra, Rp, Rv, Rz, Rz (JIS), R3z, RzDIN, Rzj, Rmax, Rc, Rt, Rq, Rsk, Rku, Rsm, Rs, R△ Q, Rk, Rpk, Rvk, Mr1, Mr2, Rmr

Ripple parameters: Wa, Wt, Wp, Wv, Wz, Wq, Wsm, Wsk, Wku, Wmr

Original contour parameters: Pa, Pt, Pp, Pv, Pz, Pq, Psm, Psk, Pku, Pmr

Profilometer

Measure range

Item Measure range Resolusyon
Column 320mm
Driver 100mm 0.2M
Load cell 15mm 0.05M
Sensor ±420μm 65536:1

Profilome

Teknikal na pagtutukoy

Some technical parameters of profilometer Linear precision1 ≤±(1.5+|0.2H|)μm
circular arc2 ≤±(2+R/8)μm
Angle3 ≤±2′
straightness4 ≤0.8μm/100mm
Roughness part technical parameters Linear precision ≤±(7nm+3.5%)
salvage value of noise5 ≤0.025μm
repeatability6 1δ≤2nm
cutoff wavelength 0.025、0.08、0.25、0.8、2.5、8mm
specified length λcX2、3、4、5、6、7
Motion control X axis Drive way electric
Z axis Drive way electric
X axis drive speed 0.1~10mm/s
Z axis drive speed 0.5-10mm/s

Tala: 1. H measures the height; 2, 2mm < R < 10mm standard ball, sampling arc Angle is 120°; 3, 60°, 90° Angle block, corner sampling length is 5mm; 4, λ C is 2.5mm, the measurement speed is less than or equal to 0.3mm/s, the measurement of flat crystal; 5, λ C is 0.08mm, the measurement speed is 0.1mm/s, the measurement of flat crystal; 6. Square wave standard parts with Ra of 0.35-0.5μm are used; 7, the above parameters were measured at 20℃±2℃, the step temperature was not more than 2℃/h and the maximum ground vibration RMS < 50Hz 2.5μm/s and RMS > 50Hz 5.0μm/s.

Profilometer

Profilometer