Описание

Vacuum Plasma Cleaner

Outline:

Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, опазване на околната среда, efficient and stable surface treatment.

Vacuum Plasma Cleaner

Пroduct feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

Vacuum Plasma Cleaner

азndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: опаковка, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

Vacuum Plasma Cleaner

Сpecification of equipment:

Power system    

radio-frequency power supply

medium-frequency power supply
мощност 0~600W 0~2000W
честота 13.56MHz 40KHz
 

 

 

 

 

 

 

 

 

 

 

 

 

Vacuum plant

 

Double-stage vane pump (oil pump)

 

 

 

 

60m3/h

 

vacuum line

All stainless steel piping and high strength vacuum bellows
texture Aluminum alloy (customizable stainless steel cavity)
thickness 25мм
leakproofness Military grade welding seal
Cavity internal dimensions 4450×450×500mm

(width × height × depth)

 

Effective size of electrode plate

420×411mm(width × depth)
Available space spacing 22.5мм
 

Electrode layout

 

 

 

Horizontal arrangement, activity extraction

 

 

Work tray Standard one set, material optional (алуминий, steel wire mesh)
 

work space

8 layer
Gas system flow range 0~300SCCM
Process gas path Standard with two, can be customized
Control system systems control PLC
delivery method 7 inch touch screen
Other parameters гранично измерение 900×1750×1000mm(w×h×d)
тегло 200КИЛОГРАМА
Equipment appearance color silver gray

 

Factory specifications:

Factory specifications
 

Ac power specification

 

 

Захранване:AC380V,50/60Hz,5wire,50А

 

Factory exhaust

 

Flow:2.0 m³/min
 

Gas requirements for plant work

 

 

Flow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:6×4 mm

Texture:PU pipe

Purity:Повече от 99.99%

 

Factory compressed air requirements

 

 

Flow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:8×5 mm

Texture:PUpipe

Dew point:-40℃ under

Particle>0.3μm:10Pcs/ft³

Vacuum Plasma Cleaner