Application of helium mass spectrum leak detector for semiconductor vacuum equipment components

The production of semiconductor devices, in addition to the need for a super-clean environment, some processes must also be carried out in high vacuum, such as magnetron sputtering platform, electron beam evaporation platform, ICP, PECVD and other equipment.

Semiconductor devices contain many layers of a wide variety of materials, and mixing gas molecules between these different layers can destroy the electrical or optical properties of the device. Some semiconductor equipment to use toxic or corrosive special gases, in the vacuum conditions of low leakage rate, these gases are not easy to leak, the equipment can remove the unreacted gas and gaseous reaction products in time to ensure the safety of process personnel.

Application of helium mass spectrum leak detector for semiconductor vacuum equipment components

Why do semiconductor devices and materials need to be leak detected?

1, semiconductor equipment requires high vacuum, such as magnetron sputtering platform, electron beam evaporation platform, ICP, PECVD and other equipment. Leakage will lead to high vacuum can not reach or require a lot of time, time consuming;

2, high cleanliness in high vacuum environment, little water vapor. Once there is a leak, the dust and suspended particles or dust in the surrounding environment will pollute the wafer, change the characteristics of the semiconductor and destroy its performance, so it is necessary to perform helium mass spectrometry leak detection in the production process of semiconductor devices.

3, some semiconductor equipment to use toxic or corrosive special gases, after helium mass spectrometry leak detection, under low leakage rate vacuum conditions, these gases are not easy to leak, the equipment can be promptly pumped away unreacted gases and gaseous reaction products, to ensure staff safety and atmospheric environment.

Application of helium mass spectrum leak detector for semiconductor vacuum equipment components

4, chip packaging, once there is a leak, the chip will fail.

In short, semiconductor manufacturing requires an extremely clean environment to ensure that products are not affected by pollution or disturbance such as air during the production process. For this reason, the need for a clean vacuum environment becomes inevitable.

Semiconductor equipment leak detection method: According to the characteristics of the product to be detected, the vacuum method can be selected to detect the leak, set the leakage rate value, and use the leak detector to directly connect the leak detection accessories. The leak detector will pump the gas inside the detection accessories to a certain vacuum degree, and then the helium gas is pursed on the outer surface of the parts through the spray gun. Noyi NHJ series mobile helium mass spectrometer leak detector is ergonomic design, strong mobility, fully in line with standards!

Use of helium mass spectrum leak detectors for semiconductor devices

Application of helium mass spectrum leak detector for semiconductor vacuum equipment components

The failure of the vacuum system of semiconductor equipment is generally divided into two categories: one is the failure of the vacuum pump group and the measurement system, and the other is the leakage of the vacuum system. For the first type of failure, it can be confirmed by testing the ultimate vacuum degree of the vacuum pump or replacing the vacuum gauge. For the second type of faults, leak detection is required. Two methods are often used in leak detection of semiconductor equipment: static pressure leak detection method and helium mass spectrometry leak detection method. Static pressure leak detection method is to separate the vacuum chamber from the vacuum pump group with a valve to measure the change of internal pressure. Helium mass spectrometry is a bit more complicated.

Helium mass spectrometry leak detector generally needs to be taken to the site, the leak detector has a molecular pump, so it should be handled lightly. The high sensitivity of the leak detector is often chosen to detect the leak, which is conducive to protecting the molecular pump. The leak detector has a limited pumping capacity, so it is often necessary to vacuum the equipment itself. The vacuum is pumped to 0.5 ~ 10Pa. Wait until the leak rate shows stable or stable to reduce before starting to detect leaks.

Application of helium mass spectrum leak detector for semiconductor vacuum equipment components

In the process of leak detection, if it is necessary to operate the door valve, crude extraction valve, air relief valve, etc., it is necessary to stop the leak detector and select the leak detector to avoid the vacuum chamber suddenly into a large amount of gas and damage the leak detector. After the vacuum is pumped, the door valve and coarse suction valve should be closed to avoid shunt resulting in the measured leakage rate less than the actual value. It is best to stop the molecular and mechanical pumps on the equipment to avoid their interference; Equipment with a cold pump should stop the cold pump if it wants to detect the leak thoroughly.

When the leakage rate of double-sealed structure products is detected by vacuum method, the leakage rate often increases slowly, so we should pay attention to this point in the process of leak detection. In addition, the helium bag is required to be non-leaking, and the helium flow rate is generally required to be small, which is conducive to confirming the location of the leak point, but there are special cases where more helium needs to be ejected in some places where helium is difficult to reach to avoid leakage. The installed bellows can not be detected when the leak is detected, and the leak should be confirmed for a second time after the leak is found, and the leak should be confirmed again after the leak is repaired.

Application of helium mass spectrum leak detector for semiconductor vacuum equipment components

In addition, due to the small size of semiconductor devices, and can not be vacuumed or directly filled with helium, and helium leak detection can not be separated from helium as a tracer gas, so Nuo Technology recommends the use of “back pressure method” leak detection.

The helium mass spectrum leak detector produced by Anhui Nuoyi Technology has been widely used in many industries with excellent quality and stable performance, advanced production equipment, standardized production process, strict quality control and a series of factors, so that our products have a good reputation in the industry, we always adhere to the premise of safety protection, strict quality control, The constant pursuit of product innovation, Nuo products, worthy of your trust.